Rotating Body of Vacuum Pump, Fixed Member Disposed Opposite Rotating Body, and Vacuum Pump Provided with Rotating Body and Fixed Member
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United States of America Patent
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Issued Date -
Nov 21, 2013
app pub date -
Nov 28, 2011
filing date -
Feb 4, 2011
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Abstract
A rotating body of a vacuum pump is partially constituted by a fiber-reinforced plastic and configured to exhaust gas by rotation. A corrosion-resistant layer is provided on the fiber-reinforced plastic portion which is the base material of the rotating body. A high-emissivity layer having a higher emissivity than the corrosion-resistant layer is provided on the corrosion-resistant layer. Fixed members facing the rotating body of the vacuum pump are each provided with a high-emissivity layer having a higher emissivity than the base material of the fixed members on the surfaces facing the fiber-reinforced plastic portion of the rotating body.
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