Electrode of electrostatic lens and method of manufacturing the same
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Feb 24, 2015
Grant Date -
Nov 21, 2013
app pub date -
Apr 15, 2013
filing date -
May 17, 2012
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An electrode to be used for an electrostatic lens, wherein the electrode at least includes: a first substrate having a first through-hole and a second substrate having a second through-hole; the first substrate having a thickness smaller than the second substrate; the first through-hole having a diameter smaller than the second through-hole; the second substrate having a specific resistance smaller than the first substrate, wherein the first substrate and the second substrate are superimposed so that the first through-hole and the second through-hole are aligned relative to each other. Notching taking place near any of the through-holes in a dry etching process can be reduced, and thus, the through-holes can be formed accurately.
First Claim
Other Claims data not available
Family
International Classification(s)
- 2013 Application Filing Year
- H01J Class
- 2042 Applications Filed
- 1790 Patents Issued To-Date
- 87.66 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 14 Citation Count
- H01J Class
- 80.54 % this patent is cited more than
- 10 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Aug 24, 2026 |
