ELEMENT FOR FAST MAGNETIC BEAM DEFLECTION

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20130306863A1
SERIAL NO

13895576

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Abstract

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A deflector system for fast magnetic deflection of a charged particle beam is described. The deflector system includes a tube for separating the beam from the magnetic deflector coil arrangement, the tube having a middle section, at least a first end section, and a second end section, wherein a wall thickness of the middle section is lower than a wall thickness of at least one of the first end section and the second end section.

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Patent Owner(s)

Patent OwnerAddress
ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUR HALBLEITERPRUFTECHNIK MBHGERMAN HIMES TWEETEN HEIMSTETTEN BAVARIA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
ADAMEC, Pavel Haar, DE 53 1042
SALVESEN, Carlo Massing, DE 6 52

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