SUBLIMABLE AROMATIC COMPOUND REMOVING UNIT FOR PROCESS GAS ANALYZING DEVICE, AND PROCESS GAS ANALYZING DEVICE INCLUDING THE SAME
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United States of America Patent
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Issued Date -
Nov 21, 2013
app pub date -
May 20, 2013
filing date -
May 18, 2012
priority date (Note) -
Abandoned
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Abstract
A process gas analyzing device is provided. The process gas analyzing device may include a sample gas introducing unit configured to introduce a process gas including a sublimable aromatic compound; a sublimable aromatic compound removing unit configured to remove the sublimable aromatic compound; a process gas pretreatment unit arranged between the sample gas introducing unit and the sublimable aromatic compound removing unit; and a gas analyzing unit arranged in a downstream position of the sublimable aromatic compound removing unit. The sublimable aromatic compound removing unit may include an adsorbent of activated carbon including a non-volatile acid.
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