Method of making aluminum oxynitride coated article
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United States of America Patent
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Sep 9, 2014
Grant Date -
Nov 14, 2013
app pub date -
Jun 3, 2013
filing date -
Mar 15, 2011
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Abstract
A method for making a coated article wherein the method includes the following steps: providing a substrate; and depositing an aluminum oxynitride coating layer from a gaseous mixture. The gaseous mixture contains the following components: 30.0-65.0 volume percent nitrogen, 0.7-1.3 volume percent aluminum tri-chloride; 1.0-2.0 volume percent ammonia, 0.1-1.5 carbon dioxide, 1.5-4.5 volume percent hydrogen chloride, optional components of carbon monoxide and/or argon, and hydrogen as the balance.
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