Electrode assemblies, plasma generating apparatuses, and methods for generating plasma
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United States of America Patent
Stats
-
Jun 12, 2018
Issued Date -
N/A
app pub date -
Jul 16, 2013
filing date -
Jan 28, 2008
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
Electrode assemblies for plasma reactors include a structure or device for constraining an arc endpoint to a selected area or region on an electrode. In some embodiments, the structure or device may comprise one or more insulating members covering a portion of an electrode. In additional embodiments, the structure or device may provide a magnetic field configured to control a location of an arc endpoint on the electrode. Plasma generating modules, apparatus, and systems include such electrode assemblies. Methods for generating a plasma include covering at least a portion of a surface of an electrode with an electrically insulating member to constrain a location of an arc endpoint on the electrode. Additional methods for generating a plasma include generating a magnetic field to constrain a location of an arc endpoint on an electrode.
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International Classification(s)
Cited Art Landscape
Patent Citation Ranking
- 8 Citation Count
- H01J Class
- 31.16 % this patent is cited more than
- 7 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Dec 12, 2025 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Dec 12, 2029 |
