SPUTTERING DEVICE WITH A TUBULAR TARGET
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United States of America Patent
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Issued Date -
Nov 14, 2013
app pub date -
Aug 24, 2011
filing date -
Sep 3, 2010
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A sputtering device with a tubular target, includes a holding device with a supporting shaft having a shaft flange connected to the target tube detachably and in a water-tight manner by a clamping device. The end of the target tube facing the shaft flange of the supporting shaft is flangeless and a spacer ring is arranged detachably on the outer side of the tube in a predetermined position. The spacer ring is held by a form-fitting connection at a minimum distance from the end of the target tube. The clamping device includes the shaft flange of the supporting shaft, the spacer ring and a clamping ring which engages over the shaft flange and the spacer ring and comprises at least two pieces. At least one sealing element is arranged between the outer side and/or the end side of the target tube, and an opposite sealing face of the shaft flange.
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