Method of recovering film-forming material
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United States of America Patent
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Mar 11, 2014
Grant Date -
Nov 7, 2013
app pub date -
Dec 16, 2011
filing date -
Dec 23, 2010
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Abstract
A layer (71), made from a material that is attracted by a magnet, is formed in at least part of a chamber component (70), which at least part makes in contact with a film forming material. A method for collecting a film forming material includes the steps of: (a) exfoliating an attachment (22) which has attached to a surface of the chamber component (70); and (b) collecting the attachment (22) by separating a fragment of the layer (71), which fragment has been exfoliated in the step (a), while causing the fragment to be attracted by a magnet (202a).
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