Insulated dielectric window assembly of an inductively coupled plasma processing apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Sep 6, 2016
Grant Date -
Nov 7, 2013
app pub date -
May 2, 2012
filing date -
May 2, 2012
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An insulated dielectric window assembly comprising a dielectric window of an inductively coupled plasma processing apparatus; an upper polymeric ring, and a lower polymeric ring. The upper polymeric ring insulates the outer edge of the dielectric window from a cooler ambient atmosphere and the lower polymeric ring insulates the lower surface of the dielectric window from a chamber surface supporting the window.
First Claim
Family
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully