LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
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United States of America Patent
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app pub date -
Jun 25, 2013
filing date -
Aug 6, 2007
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Abandoned
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Abstract
A method for generating radiation includes supplying a fuel to a discharge space, creating a discharge in the fuel to form a plasma, and reducing a volume defined by the plasma by controlling radiation emission by the plasma. The reducing includes supplying a substance including at least one of Ga, In, Bi, Pb or Al to the plasma to control the radiation emission.
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