INSULATING-LAYER-CONTAINING CERAMIC MEMBER, METAL-MEMBER-CONTAINING CERAMIC MEMBER, CHARGED PARTICLE BEAM EMITTER, AND METHOD FOR PRODUCING INSULATING-LAYER-CONTAINING CERAMIC MEMBER
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United States of America Patent
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Issued Date -
Oct 31, 2013
app pub date -
Dec 27, 2011
filing date -
Dec 28, 2010
priority date (Note) -
Abandoned
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Abstract
A ceramic member containing an insulating member is disclosed. The ceramic member comprises a ceramic body and an insulating layer on the ceramic body. The ceramic body contains aluminum oxide crystals and aluminum titanate crystals. The insulating layer contains silicon oxide as a main component. The ceramic body includes a first region that includes a first surface portion covered by the insulating layer, and a second region outside the first region, and having a surface resistivity of 1×106 to 1×109Ω/□. A surface resistivity of the first region is higher than the surface resistivity of the second region.
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