HEATING SYSTEM FOR HEATING SEMICONDUCTOR MATERIAL DISPOSED IN A CRUCIBLE
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United States of America Patent
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Issued Date -
Oct 31, 2013
app pub date -
Sep 14, 2012
filing date -
Apr 25, 2012
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A heating system includes first and second heating devices, a temperature sensor, a first controller and a second controller. The first and second heating devices are respectively arranged above a crucible and around the crucible for heating semiconductor material in the crucible. The temperature sensor is configured to detect the temperature of the first heating device and to generate a temperature signal. The first controller is configured to control operation of the first heating device so as to adjust the temperature thereof based on the temperature signal. The second controller is coupled to the second heating device and is configured to control operation of the second heating device so as to adjust the temperature thereof, based on an external control signal.
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