METHOD OF MANUFACTURING DIELECTRIC DEVICE AND ASHING METHOD

United States of America Patent

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Issued Date
Oct 31, 2013
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Dec 19, 2011
filing date
Dec 20, 2010

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Abandoned

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Abstract

[Object] To provide a method of manufacturing a dielectric device and an ashing method that are capable of suppressing the occurrence of resist residue.

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Patent Owner	Address
ULVAC INC	KANAGAWA JAPAN KANAGAWA

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H01B:CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATER....

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Inventor Name	Address	# of filed Patents	Total Citations
Kokaze, Yutaka	Shizuoka, JP	11	189
Yoshida, Yoshiaki	Shizuoka, JP	33	613

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METHOD OF MANUFACTURING DIELECTRIC DEVICE AND ASHING METHOD

Number of patents in Portfolio can not be more than 2000

United States of America Patent

13995846

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13995846

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