ELECTRO-ACTIVE MICROELECTROMECHANICAL DEVICE AND CORRESPONDING DETECTION PROCESS
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Oct 31, 2013
app pub date -
Sep 13, 2011
filing date -
Sep 13, 2010
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Abstract
An electroactive microelectromechanical device of the Artificial Hair Cell type includes a moving cilium structure having a substrate and a cantilever, partly or entirely in piezoelectric material, subject to bending or deformation following the action of a force and/or an applied voltage. The cantilever includes a multilayer inducing a stress-driven geometry in which a portion of the cantilever lies outside of a plane defined by the substrate. According to the invention, the cantilever is associated to a piezoresistive element, in particular of piezoresistive material configured to measure the bending or deformation of the cantilever.
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