Photosensitive, developer-soluble bottom anti-reflective coating material
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United States of America Patent
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Jun 25, 2019
Grant Date -
Oct 24, 2013
app pub date -
Apr 22, 2013
filing date -
Apr 23, 2012
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Abstract
Photosensitive, developer-soluble bottom anti-reflective coatings are described. Compositions and methods of forming the same are also disclosed along with resulting microelectronic structures. The anti-reflective compositions comprise a multi-functional epoxy compound having multiple epoxy moieties pendant therefrom and one or more crosslinkable chromophores bonded thereto. The compounds are dispersed or dissolved in a solvent system with a vinyl ether crosslinker and can be used to create crosslinkable and de-crosslinkable coatings for microelectronics fabrication.
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