METHOD FOR PREVENTING THE COLLAPSE OF HIGH ASPECT RATIO STRUCTURES DURING DRYING

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United States of America Patent

APP PUB NO 20130280123A1
SERIAL NO

13819249

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Abstract

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Methods of reducing the capillary forces experienced by fragile high aspect ratio structures during drying to substantially prevent damage to said high aspect ratio structures during drying. They include modifying the surface of the high aspect ratio structures such that the forces are sufficiently minimized and as such less than 10% of the high aspect ratio features will have bent or collapsed during drying of the structure having said features thereon.

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Patent Owner(s)

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ADVANCED TECHNOLOGY MATERIALS INC7 COMMERCE DRIVE DANBURY CT 06810

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bilodeau, Steven Oxford, US 14 118
Chen, Tianniu Rocky Hill, US 68 1123
Cooper, Emanuel I Scarsdale, US 71 1001
Korzenski, Michael B Danbury, US 60 1552
Matsuoka, Masahiro Kyoto, JP 26 413
Nakanishi, Mutsumi Kyoto, JP 6 71
Nakayama, Fumio San Jose, US 5 59
Payne, Makonnen San Jose, US 8 387
Sheu, Chimin Hsin Chu, TW 3 37
Veccharelli, Kate Danbury, US 1 30
Zhang, Peng Montvale, US 846 8792

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