THIN FILM PIEZOELECTRIC ELEMENT AND MANUFACTURING METHOD THEREOF, MICRO-ACTUATOR, HEAD GIMBAL ASSEMBLY AND DISK DRIVE UNIT WITH THE SAME
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United States of America Patent
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Issued Date -
Oct 24, 2013
app pub date -
Apr 19, 2012
filing date -
Apr 19, 2012
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Abstract
A thin film piezoelectric element of the present invention includes a substrate and a piezoelectric thin film stack formed on the substrate. The piezoelectric thin film stack includes a top electrode layer, a bottom electrode layer and a piezoelectric layer sandwiched between the top electrode layer and the bottom electrode layer, wherein the piezoelectric layer includes a first piezoelectric layer and a second piezoelectric layer whose compositions have different phase structures. The present invention can obtain high piezoelectric constants, enhanced coercive field strength, thereby enabling larger applied field strength without depolarization and achieving a large stroke for its applied device.
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