ANNULAR STRUCTURE AND MICRO SCANNING MIRROR
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United States of America Patent
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Issued Date -
Oct 24, 2013
app pub date -
Jul 6, 2012
filing date -
Apr 19, 2012
priority date (Note) -
Abandoned
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Abstract
A micro scanning mirror is disclosed in the present invention. The micro scanning mirror includes a substrate, an annular structure and a mirror structure. The substrate includes a hollow area and a first shaft. The annular structure is disposed inside the hollow area on the substrate and encircles the mirror structure. The mirror structure includes a second shaft connected to the annular structure. The annular structure includes at least one first edge, at least one second edge and a first comb electrode. The first edge is connected to the first shaft, and an end of the second edge is connected to the first edge. The second edge includes a first side adjacent to the mirror structure, and a second side adjacent to the substrate. The first comb electrode is disposed on the second edge.
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