PIEZOELECTRIC MICROMACHINED ULTRASOUND TRANSDUCER WITH PATTERNED ELECTRODES
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United States of America Patent
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Issued Date -
Oct 24, 2013
app pub date -
Mar 15, 2013
filing date -
Apr 19, 2012
priority date (Note) -
Abandoned
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Abstract
A piezoelectric micro-machined ultrasonic transducer (PMUT) uses multiple electrodes, e.g., in a radial pattern for a disc, to improve performance. The multiple electrodes may be differentially driven to operate the PMUT in d31 mode (that is, with an applied electrical field perpendicular to the piezoelectrically-induced strain) where deflection relative to input voltage is increased and in-plane stresses are reduce, thus improving overall performance.
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