COATING APPARATUS HAVING A HIPIMS POWER SOURCE
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United States of America Patent
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Issued Date -
Oct 24, 2013
app pub date -
Jan 27, 2011
filing date -
Jan 29, 2010
priority date (Note) -
Abandoned
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Abstract
A coating apparatus having a vacuum chamber, a plurality of cathodes arranged therein and also a HIPIMS power source, characterized in that in addition to at least one coating cathode which can be operated with the HIPIMS power source a plurality of etching cathodes is provided which are smaller in area in comparison to the coating cathode, with the etching cathodes being connectable in a predetermined or predeterminable sequence to the HIPIMS power source.
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