VERTICAL FURNACE WITH CIRCUMFERENTIALLY DISTRIBUTED GAS INLET SYSTEM
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Oct 24, 2013
app pub date -
Apr 23, 2012
filing date -
Apr 23, 2012
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A vertical furnace comprises a substantially cylindrical process tube vertically extending and delimiting a reaction space; a boat for accommodating a plurality of substrates to be vertically spaced apart from each other; a gas inlet system comprising a plurality of distribution tubes disposed at a circumference of the reaction space, wherein each of the distribution tubes have a plurality of gas injection holes distributed over a length of the distribution tubes and the distribution tubes are symmetrically disposed along an entire circumference of the reaction space; and at least one reaction gas source connected to the gas inlet system.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully