VERTICAL WAFER BOAT
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United States of America Patent
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Issued Date -
Oct 17, 2013
app pub date -
Apr 16, 2012
filing date -
Apr 16, 2012
priority date (Note) -
Abandoned
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Abstract
A wafer boat for holding a plurality of semiconductor wafers in a spaced apart relationship during processing, comprising at least one support member defining a plurality of sets of at least two vertically spaced apart wafer holding provisions, each of which wafer holding provisions is configured to independently hold a wafer in a substantially horizontal orientation, and wherein said sets are arranged such that the wafer boat is configured to accommodate a plurality of juxtaposed stacks of substantially horizontally oriented, vertically spaced apart wafers.
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