NANOLAMINATES OF Al2O3/TiO2 WITH GIANT DIELECTRIC CONSTANT LOW-LEAKAGE-LOW LOSS-EXTENDED FREQUENCY OPERATION FOR NEW-GENERATION NANOELECTRONICS AND ENERGY STORAGE DEVICES
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United States of America Patent
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Issued Date -
Oct 10, 2013
app pub date -
Apr 5, 2012
filing date -
Apr 5, 2012
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Abandoned
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Abstract
The invention relates generally to a nanolaminate structure involving Al2O3 thin films as a main component. The nanolaminate is used between a top electrode and a bottom electode to form a capacitor. The naonolaminate layer comprises alternating layers of Al2O3 and TiO2 and an interfacial layer.
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