Importance

Loading Importance Indicators...

Abstract

The present invention provides a semiconductor structure with a hybrid of Ge and a group III-V material coplanar and a preparation method thereof. A heterogeneously integrated semiconductor structure with Ge and a group III-V semiconductor material coplanar includes at least one Ge substrate formed on a bulk silicon substrate, and the other substrate is the group III-V semiconductor material formed on the Ge semiconductor. The preparation method includes: preparing a Ge semiconductor layer on a bulk silicon substrate; preparing a group III-V semiconductor material layer on the Ge semiconductor layer; performing first photolithography and etching to make a patterned window to a Ge layer so as to form a recess; preparing a spacer in the recess; preparing a Ge film through selective epitaxial growth; performing chemical mechanical polishing to obtain a heterogeneously integrated semiconductor structure with a hybrid of Ge and the group III-V semiconductor material coplanar; removing the spacer and a defect part of the Ge layer close to the spacer; implementing isolation between Ge and the group III-V semiconductor material; and preparing a high performance CMOS device including a Ge channel PMOS and a group III-V channel NMOS by forming an MOS structure.

Loading the Abstract Image...

First Claim