METHOD FOR THE PLASMA TREATMENT OF WORKPIECES AND WORKPIECE COMPRISING A GAS BARRIER LAYER
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United States of America Patent
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Issued Date -
Oct 10, 2013
app pub date -
Dec 15, 2011
filing date -
Dec 15, 2010
priority date (Note) -
Abandoned
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Abstract
The method serves for the plasma treatment of workpieces. The workpiece is inserted into a chamber of a treatment station that can be at least partially evacuated. The plasma chamber is bounded by a chamber bottom, a chamber top and a lateral chamber wall. The plasma treatment involves depositing a coating on the workpiece. The ignition of the plasma is performed by microwave energy. The coating consists at least of a gas barrier layer and a protective layer. The gas barrier layer contains SiOx and the protective layer contains carbon. The protective is produced from a gas that contains at least a silicon compound and argon.
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