CVD REACTOR CLEANING METHODS AND SYSTEMS
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United States of America Patent
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Issued Date -
Oct 10, 2013
app pub date -
Apr 6, 2012
filing date -
Apr 6, 2012
priority date (Note) -
Abandoned
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Abstract
A portable cleaning system for a CVD reactor. The cleaning system comprises two components: (1) a stand-mounted gloved box assembly for mounting a flow flange or shower head of a CVD reactor thereto, and (2) a gloved device such as a gloved flange or gloved cylinder for mounting to the reactor chamber. Both components can be equipped with a filtration device for capturing particles that are cleaned out of the CVD reactor. Both systems can be purged with an inert gas to guard against pyrophoric reactions. The system can be used for cleaning existing CVD reactors without the need for costly modification of the CVD reactor to accommodate the cleaning equipment. Also, one cleaning system can be used to service several CVD reactors.
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