Group 2 Imidazolate Formulations for Direct Liquid Injection
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United States of America Patent
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Issued Date -
Oct 3, 2013
app pub date -
Mar 22, 2013
filing date -
Mar 30, 2012
priority date (Note) -
Abandoned
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Abstract
A composition comprising group 2 imidazolate compounds which are coordinated to suitable neutral donor ligand molecules to provide group 2 metal complexes that are highly soluble in hydrocarbon solvents. In one embodiment, the composition is used for the direct liquid injection delivery of the group 2 precursor to the chamber of an ALD or CVD chamber for the deposition of group 2 containing thin films such as, for example, STO and BST films.
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