PUMPING SYSTEM FOR EVACUATING GAS FROM A PLURALITY OF CHAMBERS AND METHOD FOR CONTROLLING THE PUMPING SYSTEM
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United States of America Patent
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Issued Date -
Oct 3, 2013
app pub date -
Mar 27, 2013
filing date -
Mar 30, 2012
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Abstract
A pumping system for evacuating gas from a plurality of chambers, includes at least one turbomolecular pump, at least two fore-vacuum pumps, at least one connection conduit extending between the at least two fore-vacuum pumps. and at least one transverse constriction for at least one of reducing and regulating gas flow.
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