Sensors Incorporating Freestanding Carbon NanoStructures
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United States of America Patent
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Issued Date -
Oct 3, 2013
app pub date -
Jun 24, 2009
filing date -
Jun 24, 2009
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Abstract
Sensors for detecting IR radiation, UV radiation, X-Rays, light, gas, and chemicals. The sensors herein incorporate freestanding carbon nanostructures, such as single-walled carbon nanotubes (“SWCNT”), atomically thin carbon sheets having a thickness of about between 1 atom and about 5 atoms (“graphene”), and combinations thereof. The freestanding carbon nanostructures are suspended above a substrate by a plurality of conductors, each conductor electrically connected to the carbon nanostructure. In one method of manufacture, a resonance chamber is formed under the carbon nanostructure by etching of the substrate, yielding a sensor wherein the resonance chamber is bounded by at least the substrate and the carbon nanostructure.
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