APPARATUS AND METHOD TREATING SUBSTRATE
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Oct 3, 2013
app pub date -
Mar 27, 2013
filing date -
Mar 28, 2012
priority date (Note) -
Published
status (Latency Note)
Importance
Calculated Rating
|
US Family Size
|
Non-US Coverage
|
Abstract
A substrate treating apparatus is provided which includes a housing which provides a space in which a process is performed; a spin head which supports and rotates a substrate; and a spray unit which sprays a fluid on the substrate. The spray unit comprises a first nozzle mistily spraying a first fluid; and second nozzle spraying a second fluid.
First Claim
Other Claims data not available
Family
+
−
| Country | kind | publication No. | Filing Date |
|---|---|---|---|
| KR | B1 | KR101344921 | Mar 28, 2012 |
| JP | A | JP2013207303 | Mar 26, 2013 |
| CN | B | CN103357607 | Mar 28, 2013 |
International Classification(s)
- 2013 Application Filing Year
- B05B Class
- 976 Applications Filed
- 884 Patents Issued To-Date
- 90.58 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 10 Citation Count
- B05B Class
- 8.18 % this patent is cited more than
- 12 Age