APPARATUS FOR TREATING SUBSTRATE
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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N/A
Issued Date -
Oct 3, 2013
app pub date -
Mar 27, 2013
filing date -
Mar 30, 2012
priority date (Note) -
Abandoned
status (Latency Note)
Importance
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US Family Size
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Non-US Coverage
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Abstract
A substrate treating apparatus is provided which includes a treatment container which provides a space in which a substrate is washed; a substrate support member which is included in the space and supports the substrate; a spray member which selectively sprays a plurality of fluids on the substrate seated on the substrate support member. The treatment container comprises a plurality of recovery containers the entrances of which are stacked in an up-and-down direction to receive a fluid within the space; a first elevation member which moves the plurality of recovery containers in an up-and-down direction; and a second elevation member which relatively moves a part of the plurality of recovery containers in an up-and-down direction with respect to the remaining recovery containers.
First Claim
Other Claims data not available
Family
| Country | kind | publication No. | Filing Date |
|---|---|---|---|
| KR | A | KR20130111150 | Jul 06, 2012 |
| JP | A | JP2013214744 | Mar 28, 2013 |
| CN | B | CN103367207 | Mar 29, 2013 |
| KR | A | KR20150020634 | Jan 05, 2015 |
International Classification(s)
- 2013 Application Filing Year
- B08B Class
- 729 Applications Filed
- 646 Patents Issued To-Date
- 88.62 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 1 Citation Count
- B08B Class
- 8.06 % this patent is cited more than
- 12 Age