LIGHT SCANNING MIRROR DEVICE, CONTROL METHOD FOR THE SAME, AND AN IMAGE DRAWING DEVICE EMPLOYING THE SAME
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United States of America Patent
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Issued Date -
Sep 26, 2013
app pub date -
Mar 8, 2013
filing date -
Mar 22, 2012
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A light scanning mirror device is provided, which can be improved low power consumption, low voltage, small size, and a large scanning angle. The light scanning mirror device comprises a reflective mirror; and a torsion beam connecting the reflective mirror with a frame structure so as to enable the reflective mirror to rotate around an axis; a pair of cantilevers arranged perpendicular to the axis of rotation of the reflective mirror, and in axial symmetry centering on the axis of rotation; and a fixed electrode arranged oppositely to the cantilever in parallel at rest. The fixed electrode comprises an adsorptive fixed electrode on the free end side of the cantilever, and a rotation controlling fixed electrode on the fixed end side of the cantilever. The cantilever, the adsorptive fixed electrode, and the rotation controlling fixed electrode are configured to be separated electrically with each other.
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