SUBSTRATE CARRIER AND SELENIZATION PROCESS SYSTEM THEREOF
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United States of America Patent
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Issued Date -
Sep 12, 2013
app pub date -
May 7, 2012
filing date -
Mar 6, 2012
priority date (Note) -
Abandoned
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Abstract
A substrate carrier is used for carrying a plurality of back electrode substrates into a furnace. Each back electrode substrate has a precursor layer formed thereon. The furnace is used for providing a process gas to react with the precursor layer, so as to form a photoelectric transducing layer on each back electrode substrate. The substrate carrier includes a heat-resistant metal frame and a first protective layer. The heat-resistant metal frame has a plurality of slots for supporting the plurality of back electrode substrates. The first protective layer is formed on the heat-resistant metal frame for preventing a chemical reaction of the heat-resistant metal frame with the process gas.
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