FIELD STOP STRUCTURE, REVERSE CONDUCTING IGBT SEMICONDUCTOR DEVICE AND METHODS FOR MANUFACTURING THE SAME

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United States of America Patent

APP PUB NO 20130234201A1
SERIAL NO

13790292

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Abstract

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A field stop structure is disclosed. The field stop structure is divided into a three-dimensional structure by a plurality of trenches formed on a back side of a silicon substrate and hence obtains a greater formation depth in the substrate and can achieve a higher ion activation efficiency. Moreover, a first electrode region of a fast recovered diode (FRD) is formed in the trenches, thereby enabling the integration of a FRD with an insulated gate bipolar transistor (IGBT) device. Methods for forming field stop structure and reverse conducting IGBT semiconductor device are also disclosed.

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Patent Owner(s)

Patent OwnerAddress
SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING CORPORATIONNO 1399 ZU CHONG ZHI ROAD ZHANGJIANG HI-TECH PARK PUDONG NEW AREA SHANGHAI 201203

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Inventor Name Address # of filed Patents Total Citations
Xiao, Shengan Shanghai, CN 16 111

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