METHOD FOR SPARK DEPOSITION USING CERAMIC TARGETS
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United States of America Patent
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Issued Date -
Aug 29, 2013
app pub date -
Apr 13, 2011
filing date -
May 4, 2010
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Abstract
The present invention relates to an arc deposition source, comprising an electrically conductive ceramic target plate (1), on the back of which a cooling plate (10) is provided, wherein a shield (3) is provided in the central area on the surface to be coated so that the cathode spot of the arc does not reach the central area (6) of the surface during operation of the deposition source.
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