TEMPERATURE SENSOR AND HEAT TREATING APPARATUS

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20130209949A1
SERIAL NO

13751812

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A rising characteristic of a temperature is improved, and high-accuracy temperature control is enabled. A temperature sensor according to the present invention includes a temperature detecting element, a heat receiving body to which the temperature detecting element is fixed and that is heated by receiving surrounding heat, a heat receiving body supporting mechanism supporting the heat receiving body at a predetermined position, and a protective tube adjusting the heat receiving body in a predetermined direction and at a predetermined position and holding the heat receiving body therein. In the temperature sensor, the heat receiving body is in a flat plate shape, the temperature detecting element is fixed to the heat receiving body, and the heat receiving body supporting mechanism includes a plurality of connecting narrow tubes connected to one another and a connecting wire passing through the respective connecting narrow tubes to connect and support all the connecting narrow tubes.

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Patent Owner(s)

Patent OwnerAddress
TOKYO ELECTRON LIMITED3-1 AKASAKA 5-CHOME MINATO-KU TOKYO 1076325 ?1076325
FENWAL CONTROLS OF JAPAN LTDKYOHAN KUDAN BLDG 5-10 IIDABASHI 1-CHOME CHIYODA-KU TOKYO 102-0072

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
KURIHARA, TSUTOMU Tokyo, JP 18 63
SAITO, TAKANORI Oshu-shi, JP 113 2068
YOSHII, KOJI Oshu-shi, JP 31 562

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