LIQUID PHASE SYNTHESIS OF TRISILYLAMINE

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United States of America Patent

APP PUB NO 20130209343A1
SERIAL NO

13371010

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Disclosed are liquid phase synthesis methods to produce trisilylamine.

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Patent Owner(s)

Patent OwnerAddress
AMERICAN AIR LIQUIDE INC46409 LANDING PARKWAY FREMONT CA 94538

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
KOROLEV, Andrey V Newark, US 9 20

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