Single-axis flexure bearing configurations
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United States of America Patent
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Dec 1, 2015
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Aug 15, 2013
app pub date -
Aug 15, 2012
filing date -
Aug 15, 2011
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Abstract
Flexure bearing systems and configurations guide translational motion along a single-axis in micro and macro applications such as micro-electro-mechanical system (MEMS) devices including sensors and actuators like electrostatic comb-drive actuators. The flexure bearing systems and configurations described herein provide an improved constraint against movement (i.e., stiffness) of the primary mover in non-motion axes such as a bearing axis.
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