Combo Transducer and Combo Transducer Package
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United States of America Patent
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N/A
Issued Date -
Aug 15, 2013
app pub date -
Feb 11, 2013
filing date -
Feb 14, 2012
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A combo transducer includes a base, a proof mass, a membrane unit and a plurality of transducing components. The base is formed with an aperture. The proof mass is disposed in the aperture and has a surface that is formed with a cavity. The membrane unit includes a supporting part connected to the base, a covering part disposed to cover the surface of the proof mass, and a resilient linking part interconnecting the supporting part and the covering part such that the proof mass is movable relative to the base. The transducing components are disposed at the membrane unit. At least one of the transducing components is disposed at the covering part and is registered with the cavity.
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