METAL FILM DEPOSITION

United States of America Patent

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Issued Date
Aug 8, 2013
app pub date
May 27, 2011
filing date
Jul 22, 2010

priority date (Note)
Abandoned

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Abstract

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Disclosed are modified Atomic Layer Deposition processes used to deposit metal films on a substrate.

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Patent Owner(s)

Patent Owner	Address
AMERICAN AIR LIQUIDE INC	46409 LANDING PARKWAY FREMONT CA 94538

International Classification(s)

C23C:COATING METALLIC MATERIAL; COATING MATERIAL WITH M....

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[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Dussarrat, Christian	Tokyo, JP	139	7373
Omarjee, Vincent M	Grenoble, FR	29	485

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11.5 Year Payment	$7400.00	$3700.00	$1850.00	Feb 8, 2025

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METAL FILM DEPOSITION

Number of patents in Portfolio can not be more than 2000

United States of America Patent

13811472

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APP PUB NO	20130202794A1
SERIAL NO	13811472
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13811472

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Importance

Abstract

First Claim

Family

Patent Owner(s)

International Classification(s)

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Patent Citation Ranking

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