THIN FILM TRANSISTOR ARRAY SUBSTRATE AND METHOD FOR MANUFACTURING THE SAME
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United States of America Patent
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Issued Date -
Aug 8, 2013
app pub date -
Feb 7, 2012
filing date -
Feb 6, 2012
priority date (Note) -
Abandoned
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Abstract
The present invention provides a thin film transistor (TFT) array substrate and a method for manufacturing the same. After depositing a first metal layer on a substrate, a first mask is utilized to form gate electrodes. After depositing a gate insulating layer and a semiconductor layer on the substrate, a second mask is utilized to pattern the semiconductor layer, so as to keep portions of the semiconductor layer above the gate electrodes. After depositing a transparent and electrically conductive layer and a second metal layer on the substrate, a multi tone mask is utilized to form source electrodes, drain electrodes, pixel electrodes and common electrodes. The present invention can simplify the manufacturing process thereof.
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