ION PUMP SYSTEM
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United States of America Patent
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Issued Date -
Aug 1, 2013
app pub date -
Apr 2, 2010
filing date -
Apr 2, 2010
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Abstract
Disclosed is an ion pump system capable of efficaciously utilizing electrical fields and magnetic fields in all portions of a getter face, and thus of substantially improving exhaust efficiency. In particular, the present disclosure is based on the discovery that disposing a plurality of disc-shaped electrodes upon an internal casing (12) and further disposing a plurality of disc-shaped electrodes also upon an external casing (11) eliminates saddle points, allowing efficacious utilization of electrical fields and magnetic fields in all portions of the getter face, and thus substantially improving exhaust efficiency.
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