Phase plate
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United States of America Patent
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Jul 7, 2015
Grant Date -
Aug 1, 2013
app pub date -
Dec 24, 2012
filing date -
Jan 31, 2012
priority date (Note) -
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Abstract
A phase plate for a charged particle beam system, such as a transmission electron microscope (TEM), is described. The phase plate comprises a support having a through-hole and an elongate member which is magnetisable in a direction along its length and which extends partially across the through-hole and which is narrower than the through-hole.
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