WAFER BOX AND PHOTO MASK BOX
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United States of America Patent
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N/A
Issued Date -
Aug 1, 2013
app pub date -
Sep 7, 2012
filing date -
Jan 31, 2012
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A check valve disposed inside a semiconductor device container. The check valve includes a cylinder and a check component. With opening and closing of the check component that is elastic, particles are minimized to prevent polluting objects stored in the semiconductor device container.
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