CLEANING APPARATUS, EQUIPMENT, AND METHOD
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United States of America Patent
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Issued Date -
Aug 1, 2013
app pub date -
Sep 14, 2012
filing date -
Jan 27, 2012
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Abstract
A cleaning apparatus for cleaning an object includes a cleaning tank holding a cleaning liquid, the object being cleanable by the cleaning liquid. A coupling tank holding an intermediate medium is in contact with a portion of the cleaning tank. An ultrasonic wave generation unit is disposed at the coupling tank and configured to ultrasonically vibrate the cleaning liquid via the intermediate medium. A modification unit is configured to modify a difference in sonic velocity between the cleaning liquid and the intermediate medium.
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