CLEANING METHOD
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United States of America Patent
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N/A
Issued Date -
Aug 1, 2013
app pub date -
Sep 14, 2012
filing date -
Jan 30, 2012
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A cleaning method for cleaning an object includes preparing a cleaning liquid. A dissolved nitrogen concentration in the cleaning liquid is adjusted based on a size of a foreign substance to be removed from the object with a highest removal efficiency. The object is dipped in the cleaning liquid while irradiating the cleaning liquid with ultrasonic waves.
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