Scan head and scan arm using the same

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United States of America Patent

PATENT NO 8895944
APP PUB NO 20130187349A1
SERIAL NO

13745426

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A scan head assembled to a scan arm for an ion implanter and a scan arm using the same are provided, wherein the scan head is capable of micro tilting a work piece and comprises a case, a shaft assembly, an electrostatic chuck, a first driving mechanism and a micro-tilt mechanism. The shaft assembly passes through a first side of the case and has a twist axis. The electrostatic chuck is fastened on a first end of the shaft assembly outside the case for holding the work piece. The first driving mechanism is disposed within the case and capable of driving the shaft assembly and the ESC to rotate about the twist axis. The micro-tilt mechanism is disposed within the case and capable of driving the shaft assembly and the ESC to tilt relative to the case.

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Patent Owner(s)

Patent OwnerAddress
ADVANCED ION BEAM TECHNOLOGY INC5F NO 18 CREATION ROAD 1 SCIENCE PARK HSIN-CHU 300

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
McRay, Richard F Penn Valley, US 10 64

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