Retrofitting Cleanroom Fabricators into Cleanspace Fabricators
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United States of America Patent
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Jul 18, 2013
app pub date -
Jan 6, 2013
filing date -
Jan 12, 2012
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Abstract
The present invention provides various methods for forming cleanspace fabricators by retrofitting a structure of an existing cleanroom based fabricator. In some embodiments, a cleanspace fabricator is formed within a region of a cleanroom fabricator which is not transformed.
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