Machine having an air bearing and method for operating such a machine
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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Nov 26, 2013
Grant Date -
Jul 18, 2013
app pub date -
Jul 19, 2012
filing date -
Jan 21, 2010
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A machine has a frame structure for moving a machine head in one or more spatial directions. The frame structure comprises an actuator and an air bearing for moving the head. The machine also comprises a compressed air feed connected to the air bearing for providing a compressed air flow. A restrictor defines the compressed air flow to the air bearing. The machine has a first operating state, in which a high compressed air flow is defined and in which the actuator can be actuated. The machine has a second operating state, in which a compressed air flow lower than the high compressed air flow is defined. In the second operating state, the actuator is secured against actuation from a closed-loop position controller, while the closed-loop position controller is maintained in operation.
First Claim
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
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CARL ZEISS INDUSTRIELLE MESSTECHNIK GMBH | OBERKOCHEN |
International Classification(s)

- 2012 Application Filing Year
- H02K Class
- 1853 Applications Filed
- 1610 Patents Issued To-Date
- 86.89 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Stumpp, Ernst | Koenigsbronn, DE | 5 | 19 |
# of filed Patents : 5 Total Citations : 19 |
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Patent Citation Ranking
- 2 Citation Count
- H02K Class
- 3.92 % this patent is cited more than
- 12 Age
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11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | May 26, 2025 |
Fee | Large entity fee | small entity fee | micro entity fee |
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Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
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