PULSED LASER DEPOSITION APPARATUS AND DEPOSITION METHOD USING SAME
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United States of America Patent
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app pub date -
Jul 12, 2011
filing date -
Jul 15, 2010
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Abandoned
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Abstract
Disclosed is a pulsed laser deposition apparatus, including: a laser beam generating unit which generates a laser beam; a deposition object; a vacuum chamber, in which a plurality of types of deposition target materials to be deposited on the deposition object is arranged; a beam splitter which splits the laser beam generated by the laser beam generating unit into a plurality of laser beams corresponding to the deposition target materials; and lens units which are arranged to correspond to the respective deposition target materials, and which focus the laser beams, which are applied by being split by the beam splitter, onto the respective deposition target materials.
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